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組分與濃度

稀釋氣

備注

CH3Br 0.2~0.6%

Kr Ar N2

充裝容器和充裝量根據用戶要求配制

CH3Br 0.1~0.3% Kr 10~30%

N2

CH3Br 0.2~06% Kr 15~50

Ar

CH3Br 0.2~0.5% Kr 10~30% N2 10~40%

Ar

CH3Br 0.2~0.3% Kr 30% Ar 20

N2

CH3Br 0.2~0.5% N2 15%

Ar

CH3Br 0.3~0.5% CH3Cl 0.3~0.5%

Ar

CH3Br 0.2~0.5% CH3Cl 0.1~0.5% Kr 10~20%

Ar

CH3Br 0.1~0.5% CH2Cl2 0.02~0.05%

Kr,N2

CH3Br 0.05~0.1% CH2Cl2 0.01~0.02% Ar 45%

N2

CH2Cl2 0.1~2%

Kr

CH2ClBr 0.02% Ar 10%

Kr

CH3Br 0.1~0.3% CHCl2Br 0.1~0.7% CH2ClBr 0.1~0.3%

Kr

CH3Br 0.3~0.5% CH2Cl2 0.02~0.04% H2 5%

N2

Kr 30~75

Ar

Kr 0.5~5%

Ar

Ne 50~75%

Ar

Kr 3~8% N2 20%

Ar

C2H5I 0.1~2%

Kr


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